| Author(s) | Title | Journal | Vol. | (Year) | Page/Article no. |
| Rajib, A;Karim, M.E.;Kurosu, S;Ukai, T;Tokuda, M;Fujii, Y;Hanajiri,T;Ishikawa, R; Ueno, K; Shirai, H | Synthesis of AlOx thin films by atmospheric-pressure mist chemical vapor deposition for surface passivation and electrical insulator layers | Journal of Vacuum Science & Technology A | 38 | (2020) | 033413 |
| Ishikawa, R; Ueno, K; Shirai, H | Improved efficiency of methylammonium-free perovskite thin film solar cells by fluorinated ammonium iodide treatment | Organic Electronics | 78 | (2020) | 105596 |
| Moriya, Y; Ishikawa, R; Akiyama, S; Ueno, K; Shirai, H | Self-assembled Fluorinated Polymer Passivation Layer for Efficient Perovskite Thin-film Solar Cells | Chemistry Letters | 49 | (2020) | 87-90 |
| Kawamura, K;Ishikawa, R;Wasai, Y; Nabatova-Gabain,N; Kurosu, S; Ukai, T; Tokuda, M; Fujii, Y; Hanajiri,T; Ueno, K; Shirai, H | Role of the solvent in large crystal grain growth of inorganic-organic halide FA0.8Cs0.2PbIxBr3-x perovskite thin films monitored by ellipsometry | Journal of Vacuum Science & Technology B | 37 | (2019) | 062401 |
| Islam,A.T.M.S.; Karim, M.E.; Rajib, A; Nasuno, Y; Ukai, T;Kurosu, S; Tokuda,M;Fujii, Y; Nakajima, Y;Hanajiri,T; Shirai, H | Chemical mist deposition of organic for efficient front- and back-PEDOT:PSS/crystalline Si heterojunction solar cells | Applied Physics Letters | 114 | (2019) | 193901 |
| Ishikawa, R; Ueno, K; Shirai, H | Highly crystalline large-grained perovskite films using two additives without an antisolvent for high-efficiency solar cells | Thin Solid Films | 679 | (2019) | 27-34 |
| Ishikawa, R; Ueno, K; Shirai, H | Fabrication of [CH(NH2)(2)](0.8)Cs0.2PbI3 Perovskite Thin Films for n-i-p Planar-structure Solar Cells by a One-step Method Using 1-Cyclohexyl-2-pyrrolidone as an Additive | CHEMISTRY LETTERS | 47 | (2018) | 905 |
| Numata, Y; Sanehira, Y; Ishikawa, R; Shirai, H; Miyasaka, T | Thiocyanate Containing Two-Dimensional Cesium Lead Iodide Perovskite, Cs2PbI2(SCN)(2): Characterization, Photovoltaic Application, and Degradation Mechanism | ACS APPLIED MATERIALS & INTERFACES | 10 | (2018) | 42363 |
| Kasahara, K; Hossain, J; Harada, D; Ichikawa, K; Ishikawa, R; Shirai, H | Crystalline-Si heterojunction with organic thin-layer (HOT) solar cell module using poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) | SOLAR ENERGY MATERIALS AND SOLAR CELLS | 181 | (2018) | 60 |
| Numata, Y; Ishikawa, R; Sanehira, Y; Kogo, A; Shirai, H; Miyasaka, T | Nb-doped amorphous titanium oxide compact layer for formamidinium-based high efficiency perovskite solar cells by low-temperature fabrication | JOURNAL OF MATERIALS CHEMISTRY A | 6 | (2018) | 9583 |
| Hossain, J; Kasahara, K; Harada, D;Islam, ATMS; Ishikawa, R; Ueno, K ; Hanajiri, T; Nakajima, Y; Fujii, Y; Tokuda, M; Shirai, H | Barium hydroxide hole blocking layer for front- and back-organic/crystalline Si heterojunction solar cells | JOURNAL OF APPLIED PHYSICS | 122 | (2017) | 055101 |
| Ishikawa, R; Ueno, K; Shirai, H | Fabrication of {CH(NH2)(2)}(1-x)CsxPbI3 Perovskite Thin Films by Two-step Method and Its Application to Thin Film Solar Cells | CHEMISTRY LETTERS | 46 | (2017) | 612 |
| Hossain, J; Liu, QM; Miura, T; Kasahara, K; Harada, D; Ishikawa, R; Ueno, K ; Shirai, H | Nafion-Modified PEDOT:PSS as a Transparent Hole-Transporting Layer for High-Performance Crystalline-Si/Organic Heterojunction Solar Cells with Improved Light Soaking Stability | ACS Applied Materials & Interfaces | 8 | (2016) | 31926 |
| Yamanaka, T; Masumori, K;Ishikawa, R; Ueno, K; Shirai, H | Role of Isopropyl Alcohol Solvent in the Synthesis of Organic-Inorganic Halide CH(NH2)(2)PbIxBr3-x Perovskite Thin Films by a Two-Step Method | JOURNAL OF PHYSICAL CHEMISTRY C | 120 | (2016) | 25371 |
| Liu, QM; Ishikawa, R; Funada, S; Ohki, T; Ueno, K; Shirai, H | Highly Efficient Solution-Processed Poly(3,4-ethylenedio-xythiophene):Poly(styrenesulfonate)/Crystalline-Silicon Heterojunction Solar Cells with Improved Light-Induced Stability | ADVANCED ENERGY MATERIALS | 5 | (2015) | 1500744 |
| Liu, QM; Ohki, T; Liu, DQ; Sugawara, H; Ishikawa, R; Ueno, K; Shirai, H | Efficient organic/polycrystalline silicon hybrid solar cells | NANO ENERGY | 11 | (2015) | 260 |
| Khatri, I; Liu, Q; Ishikawa, R; Ueno, K; Shirai, H | Self assembled siliver nanowire mesh as top electrode for organic-inorganic hybrid solar cell | CANADIAN JOURNAL OF PHYSICS | 92 | (2014) | 867 |
| Khatri, I; Liu, Q; Ishikawa, R; Ueno, K; Shirai, H | Improved photovoltaic response by incorporating green tea modified multiwalled carbon nanotubes in organic-inorganic hybrid solar cell | CANADIAN JOURNAL OF PHYSICS | 92 | (2014) | 849 |
| Shirai, H; Ueno, K | Solution-processed graphene oxide as a possible material for photovoltaic device | THE JOURNAL OF THE INSTITUTE OF ELECTRONICS, INFORMATION, AND COMMUNICATION ENGINEERS | 97 | (2014) | 215 |
| Tang, Z; Liu, Q; Chen, Q; Khatri, I; Shirai, H | Plasmonic-enhanced crystalline silicon/organic heterojunction cells by incorporating gold nanoparticles | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 211 | (2014) | 1179 |
| Hiate, T; Miyauchi, N; Liu, Q; Ishikawa, R; Ueno, K; Shirai, H | Real-time measurement of optical anisotropy during film growth using a chemical mist deposition of poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) | JOURNAL OF APPLIED PHYSICS | 115 | (2014) | 123514 |
| Khatri, I; Hoshino, A; Watanabe, F; Liu, Q; Ishikawa, R; Ueno, K; Shirai, H | Self-assembled silver nanowires as top electrode for poly(3,4-ethylenedioxythiophene):poly(stylenesulfonate)/n-silicon solar cell | THIN SOLID FILMS | 558 | (2014) | 306 |
| Kishi, M; Kubo, Y; Ishikawa, R; Shirai, H; Ueno, K | Efficient Organic Photovoltaic Cells Using MoO3 Hole-Transporting Layers Prepared by Simple Spin-Cast of Its Dispersion Solution in Methanol | JAPANESE JOURNAL OF APPLIED PHYSICS | 52 | (2013) | 020202 |
| Khatri, I; Tang, Z; Hiate, T; Liu, Q; Ishikawa, R; Ueno, K; Shirai, H | Optical and carrier transport properties of graphene oxide based crystalline-Si/organic Schottky junction solar cells | JOURNAL OF APPLIED PHYSICS | 114 | (2013) | 234506 |
| Liu, Q; Khatri, I; Ishikawa, R; Fujimori, A; Ueno, K; Manabe, K; Nishino, H; Shirai, H | Improved photovoltaic performance of crystalline-Si/organic Schottky junction solar cells using ferroelectric polymers | APPLIED PHYSICS LETTERS | 103 | (2013) | 163503 |
| Liu, Q; Imamura T; Hiate, T; Khatri, I; Tang, Z; Ishikawa, R; Ueno, K; Shirai, H | Optical anisotropy in solvent-modified poly(3,4-ethylenedioxythiophene):poly(styrenesulfonic acid) and its effect on the photovoltaic performance of crystalline silicon/organic heterojunction solar cells | APPLIED PHYSICS LETTERS | 102 | (2013) | 243902 |
| Liu, Q; Khatri, I; Ishikawa, R; Ueno, K; Shirai, H | Effects of molybdenum oxide molecular doping on the chemical structure of poly(3,4-ethylenedioxythiophene):poly(stylenesulfonate) and on carrier collection efficiency of silicon/poly(3,4-ethylenedioxythiophene):poly(stylenesulfonate) heterojunction solar cells | APPLIED PHYSICS LETTERS | 102 | (2013) | 183503 |
| Chen, Q; Shirai, H | Large-Area Cold Atmospheric Pressure Discharges Realized by Mesh Covered Tube-Plate Electrodes in Open Air | IEEE TRANSACTIONS ON PLASMA SCIENCE | 41 | (2013) | 421 |
| Khatri, I; Tang, Z; Liu, Q; Ishikawa, R; Ueno, K; Shirai, H | Green-tea modified multiwalled carbon nanotubes for efficient poly(3,4-ethylenedioxythiophene):poly(stylenesulfonate)/n-silicon hybrid solar cell | APPLIED PHYSICS LETTERS | 102 | (2013) | 063508 |
| Ishikawa, R; Shirai, H; Ueno, K | Increased Organic Photovoltaic Cell Efficiency by Incorporating a Nonionic Fluorinated Surfactant Cathode Interlayer | APPLIED PHYSICS EXPRESS | 5 | (2012) | 121601 |
| Hiate, T; Ino, T; Ishikawa, R; Ueno, K; Shirai, H | Electrospray-Deposited Poly(3,4-ethylenedioxythiophene):Poly(styrene sulfonate) for Poly(3-hexylthiophene):Phenyl-C-61-Butyric Acid Methyl Ester Photovoltaic Cells | JAPANESE JOURNAL OF APPLIED PHYSICS | 51 | (2012) | 10NE30 |
| Liu, QM; Wanatabe, F; Hoshino, A; Ishikawa, R; Gotou, T; Ueno, K; Shirai, H | Crystalline Silicon/Graphene Oxide Hybrid Junction Solar Cells | JAPANESE JOURNAL OF APPLIED PHYSICS | 51 | (2012) | 10NE22 |
| Chen, Q; Shirai, H | Diagnostics of atmospheric pressure microplasma with a liquid electrode | EUROPEAN PHYSICAL JOURNAL D | 66 | (2012) | 161 |
| Ino, T; Ono, M; Miyauchi, N; Liu, QM; Tang, ZG; Ishikawa, R; Ueno, K; Shirai, H | Electrospray Deposition of Poly(3-hexylthiophene) Films for Crystalline Silicon/Organic Hybrid Junction Solar Cells | JAPANESE JOURNAL OF APPLIED PHYSICS | 51 | (2012) | 61602 |
| Liu, QM; Ono, M; Tang, ZG; Ishikawa, R; Ueno, K; Shirai, H | Highly efficient crystalline silicon/Zonyl fluorosurfactant-treated organic heterojunction solar cells | APPLIED PHYSICS LETTERS | 100 | (2012) | 183901 |
| Watanabe, F; Shirai, H; Fujii, Y; Hanajiri, T | Rapid thermal annealing of sputter-deposited ZnO/ZnO:N/ZnO multilayered structures | THIN SOLID FILMS | 520 | (2012) | 3729 |
| Ono, M; Tang, ZG; Ishikawa, R; Gotou, T; Ueno, K; Shirai, H | Efficient Crystalline Si/Poly(ethylene dioxythiophene): Poly(styrene sulfonate): Graphene Oxide Composite Heterojunction Solar Cells | APPLIED PHYSICS EXPRESS | 5 | (2012) | 32301 |
| Fukuda, T; Takagi, K; Asano, T; Honda, Z; Kamata, N; Shirai, H; Ju, J; Yamagata, Y; Tajima, Y | Improved Power Conversion Efficiency of Organic Photovoltaic Cell Fabricated by Electrospray Deposition Method by Mixing Different Solvents | JAPANESE JOURNAL OF APPLIED PHYSICS | 51 | (2012) | 02BK12 |
| Ino, T; Asano, T; Fukuda, T; Ueno, K; Shirai, H | Real-Time Ellipsometric Characterization of Initial Growth Stage of Poly(3,4-ethylene dioxythiophene):Poly(styrene sulfonic acid) Films by Electrospray Deposition | JAPANESE JOURNAL OF APPLIED PHYSICS | 50 | (2011) | 81603 |
| Ino, T; Hayashi, T; Ueno, K; Shirai, H | Depth Profile Characterization of Spin-Coated Poly(3,4-ethylenedioxythiophene):Poly(styrene sulfonic acid) Films for Thin-Film Solar Cells during Argon Plasma Etching by Spectroscopic Ellipsometry | JAPANESE JOURNAL OF APPLIED PHYSICS | 50 | (2011) | 08JG02 |
| Morita, A; Watanabe, I; Ohta, N; Shirai, H | Chemical Activity of Oxygen Atoms in Magnetron Sputter-Deposited ZnO Films during Film Growth | JAPANESE JOURNAL OF APPLIED PHYSICS | 50 | (2011) | 08JD02 |
| Fukuda, T; Takagi, K; Asano, T; Honda, Z; Kamata, N; Ueno, K; Shirai, H; Ju, J; Yamagata, Y; Tajima, Y | Bulk heterojunction organic photovoltaic cell fabricated by the electrospray deposition method using mixed organic solvent | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | 5 | (2011) | 229 |
| Kato, S; Ishikawa, R; Kubo, Y; Shirai, H; Ueno, K | Efficient Organic Photovoltaic Cells Using Hole-Transporting MoO3 Buffer Layers Converted from Solution-Processed MoS2 Films | JAPANESE JOURNAL OF APPLIED PHYSICS | 50 | (2011) | 71604 |
| Ding, Y; Shirai, H; He, DY | White light emission and electrical properties of silicon oxycarbide-based metal-oxide-semiconductor diode | THIN SOLID FILMS | 519 | (2011) | 2513 |
| Ohba, D; Lai, CH; Tang, ZG; Shirai, H | Surface Chemistry of Preferentially (111)- and (220)-Crystal-Oriented Microcrystalline Silicon Films by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition | JAPANESE JOURNAL OF APPLIED PHYSICS | 49 | (2010) | 81402 |
| Jie, J; Morita, A; Shirai, H | Role of oxygen atoms in the growth of magnetron sputter-deposited ZnO films | JOURNAL OF APPLIED PHYSICS | 108 | (2010) | 33521 |
| Ohta, N; Imamura, T; Shimizu, H; Kobayashi, T; Shirai, H | Real time monitoring of the crystallization process during the plasma annealing of amorphous silicon | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 207 | (2010) | 574 |
| Saha, JK; Ohse, N; Hamada, K; Matsui, H; Kobayashi, T; Jia, HJ; Shirai, H | Fast deposition of microcrystalline Si films from SiH2Cl2 using a high-density microwave plasma source for Si thin-film solar cells | SOLAR ENERGY MATERIALS AND SOLAR CELLS | 94 | (2010) | 524 |
| Ding, Y; He, DY; Shirai, H | Deposition of low dielectric constant SiOC films by using an atmospheric pressure microplasma jet | JOURNAL OF PHYSICS D-APPLIED PHYSICS | 42 | (2009) | 125503 |
| Ding, Y; Shirai, H | White light emission from silicon oxycarbide films prepared by using atmospheric pressure microplasma jet | JOURNAL OF APPLIED PHYSICS | 105 | (2009) | 43515 |
| Chen, Q; Li, J; Saito, K; Shirai, H | The characterization of radio-frequency discharge using electrolyte solution as one electrode at atmospheric pressure | JOURNAL OF PHYSICS D-APPLIED PHYSICS | 41 | (2008) | 175212 |
| Li, JS; Wang, JX; Yin, M; Gao, PQ; He, DY; Chen, Q; Li, YL; Shirai, H | Deposition of controllable preferred orientation silicon films on glass by inductively coupled plasma chemical vapor deposition | JOURNAL OF APPLIED PHYSICS | 103 | (2008) | 43505 |
| Li, JS; Wang, JX; Yin, M; Gao, PQ; He, DY; Chen, Q; Li, YL; Shirai, H | Study on the initial growth process of crystalline silicon films on aluminum-coated polyethylene napthalate by Raman spectroscopy | JOURNAL OF CRYSTAL GROWTH | 308 | (2007) | 330 |
| Li, JS; Wang, JX; Yin, M; Gao, PQ; He, DY; Chen, Q; Shirai, H | Deposition and field emission properties of highly crystallized silicon films on aluminum-coated polyethylene napthalate | JOURNAL OF CRYSTAL GROWTH | 306 | (2007) | 1 |
| Saha, JK; Ohse, N; Hamada, K; Haruta, K; Kobayashi, T; Ishikawa, T; Takemura, Y; Shirai, H | Synthesis of microcrystalline silicon films using high-density microwave plasma source from dichlorosilane | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 46 | (2007) | L696 |
| Jia, HJ; Saha, JK; Ohse, N; Shirai, H | High-rate synthesis of microcrystalline silicon films using high-density SiH4/H2 microwave plasma | THIN SOLID FILMS | 515 | (2007) | 6713 |
| Jia, H; Shirai, H; Kondo, M | Control of the gas phase and the surface reactions during the high rate synthesis of high quality microcrystalline silicon films: Effects of the source gas supply method and the substrate bias | JOURNAL OF APPLIED PHYSICS | 101 | (2007) | 114912 |
| Shirai, H; Sakurai, Y; Yeo, M; Kobayashi, T; Ishikawa, T | Rapid crystallization of amorphous silicon utilizing a VHF plasma annealing at atmospheric pressure | EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 37 | (2007) | 315 |
| Shirai, H; Saito, T; Li, Y; Matsui, H; Kobayashi, T | Surface chemistry and preferential crystal orientation on the H and Cl terminated silicon surface | JOURNAL OF APPLIED PHYSICS | 101 | (2007) | 33531 |
| Jia, HJ; Saha, JK; Ohse, N; Shirai, H | Effect of substrate bias on high-rate synthesis of microcrystalline silicon films using a high-density microwave SiH4/H2 plasma | JOURNAL OF PHYSICS D-APPLIED PHYSICS | 39 | (2006) | 3844 |
| Hasegawa, Y; Ishikawa, Y; Saso, T; Shirai, H; Morita, H; Komine, T; Nakamura, H | A method for analysis of carrier density and mobility in polycrystalline bismuth | PHYSICA B-CONDENSED MATTER | 382 | (2006) | 140 |
| Jia, H; Saha, JK; Ohse, N; Shirai, H | High-density microwave plasma of SiH4/H2 for high rate growth of highly crystallized microcrystalline silicon films | EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 33 | (2006) | 153 |
| Jia, HJ; Saha, JK; Shirai, H | Plasma parameters for fast deposition of highly crystallized microcrystalline silicon films using high-density microwave plasma | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 45 | (2006) | 666 |
| Hasegawa, Y; Ishikawa, Y; Shirai, H; Morita, H; Kurokouchi, A; Wada, K; Komine, T; Nakamura, H | Reduction of contact resistance at terminations of bismuth wire arrays | REVIEW OF SCIENTIFIC INSTRUMENTS | 76 | (2005) | 113902 |
| Shirai, H; Kobayashi, T; Hasegawa, Y | Synthesis of silicon nanocones using rf microplasma at atmospheric pressure | APPLIED PHYSICS LETTERS | 87 | (2005) | 143112 |
| Yang, Z; Kikuchi, T; Hatou, Y; Kobayashi, T; Shirai, H | Carbon microstructures synthesized utilizing the RF microplasma jet at atmospheric pressure | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 44 | (2005) | 4122 |
| Hasegawa, Y; Ishikawa, Y; Morita, H; Komine, T; Shirai, H; Nakamura, H | Electronic transport properties of a bismuth microwire array in a magnetic field | JOURNAL OF APPLIED PHYSICS | 97 | (2005) | 83907 |
| Shirai, H; Kikuchi, T; Kobayashi, T | Synthesis of well-aligned carbon nanotubes using a high-density RF inductive coupling plasma | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 44 | (2005) | 1951 |
| Jia, H; Shirai, H | Characterization of microcrystalline silicon film growth on ZnO : Al using the high-density microwave plasma | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 44 | (2005) | 837 |
| Suzuki, A; Hasegawa, Y; Ishikawa, Y; Komine, T; Morita, H; Shirai, H | Investigation of physical and electric properties of silver pastes as a binder for thermoelectric materials | REVIEW OF SCIENTIFIC INSTRUMENTS | 76 | (2005) | 23907 |
| Sakurai, Y; Kobayashi, T; Hasegawa, Y; Shirai, H | RF microplasma jet at atmospheric pressure: Application to rapid recrystallization of amorphous silicon | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 44 | (2005) | L749 |
| Jia, HJ; Nakajima, M; Nakao, A; Shirai, H | Effects of chamber wall heating and quartz window on fast deposition of microcrystalline silicon films by high-density microwave plasma | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 43 | (2004) | 7960 |
| Ikeda, Y; Ito, T; Li, YL; Yamazaki, M; Hasegawa, Y; Shirai, H | Synthesis of novel p-type nanocrystalline Si prepared from SiH2Cl2 and SiCl4 for window layer of thin film Si solar cell | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 43 | (2004) | 5960 |
| Hasegawa, Y; Ishikawa, Y; Komine, T; Huber, TE; Suzuki, A; Morita, H; Shirai, H | Magneto-Seebeck coefficient of a bismuth microwire array in a magnetic field | APPLIED PHYSICS LETTERS | 85 | (2004) | 917 |
| Kikuchi, T; Hasegawa, Y; Shirai, H | Rf microplasma jet at atmospheric pressure: characterization and application to thin film processing | JOURNAL OF PHYSICS D-APPLIED PHYSICS | 37 | (2004) | 1537 |
| Hasegawa, Y; Komine, T; Ishikawa, Y; Suzuki, A; Shirai, H | Numerical calculation of magneto-seebeck coefficient of bismuth under a magnetic field | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 43 | (2004) | 35 |
| Kurosaki, K; Hashimoto, K; Nakao, A; Shirai, H | Photoluminescence and optical characterizations of nanocrystalline silicon dots formed by plasma-enhanced chemical vapor deposition | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 42 | (2003) | 6296 |
| Ito, T; Hashimoto, K; Shirai, H | Surface chemistry of Si : H : Cl film formation by RF plasma-enhanced chemical vapor deposition of SiH2Cl2 and SiCl4 | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 42 | (2003) | L1119 |
| Shirai, H; Seri, Y; Jia, H; Kurosaki, K | Nanocrystalline silicon dots fabricated by pulse RF plasma-enhanced chemical vapor deposition of SiCl4-and-H2 mixture | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 42 | (2003) | L1191 |
| Hashimoto, K; Shirai, H | Formation of Si : H : Cl films at low temperatures of 90-140 degrees C by RF plasma-enhanced chemical vapor deposition of a SiH2Cl2 and H2 mixture | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 42 | (2003) | 1173 |
| Yoshino, K; Ohkawara, G; Ueyama, H; Shirai, H | Microcrystalline silicon film growth using a high-density microwave plasma of SiH4-and-D2 mixture | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 41 | (2002) | 7307 |
| Shirai, H; Fujimura, Y | Photoluminesence properties of nanocrystalline Si dots fabricated by RF plasma-enhanced chemical vapor deposition of SiCl4 and H2 mixture | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 41 | (2002) | L1161 |
| Jung, SH; Fujimura, Y; Ito, T; Shirai, H | Chemistry of the chlorine-terminated surface for low-temperature growth of crystal silicon films by RF plasma-enhanced chemical vapor deposition | SOLAR ENERGY MATERIALS AND SOLAR CELLS | 74 | (2002) | 421 |
| Yoshino, K; Ohkawara, G; Ueyama, H; Shirai, H | Fast deposition of microcrystalline silicon films with preferred (220) crystallographic texture using the high-density microwave plasma | SOLAR ENERGY MATERIALS AND SOLAR CELLS | 74 | (2002) | 505 |
| Fujimura, Y; Jung, S; Shirai, H | Formation of self-assembled nanocrystalline silicon dots by SiCl4/H2 RF plasma-enhanced chemical vapor deposition | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 40 | (2001) | L1214 |
| Shirai, H; Yoshino, K; Ohkawara, G; Ueyama, H | Novel high-density microwave plasma utilizing an internal spoke antenna for fast deposition of microcrystalline silicon films | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 40 | (2001) | L701 |
| Liu, HP; Jung, SH; Fujimura, Y; Toyoshima, Y; Shirai, H | Growth of crystal silicon films from chlorinated silanes by RF plasma-enhanced chemical vapor deposition | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 40 | (2001) | L215 |
| Shirai, H; Sakuma, Y; Yoshino, K; Ueyama, H | Spatial distribution of high-density microwave plasma for fast deposition of microcrystalline silicon film | SOLAR ENERGY MATERIALS AND SOLAR CELLS | 66 | (2001) | 137 |
| Liu, HP; Jung, SG; Fujimura, Y; Fukai, C; Shirai, H; Toyoshima, Y | Low-temperature plasma-enahanced chemical vapor deposition of crystal silicon film from dichlorosilane | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 40 | (2001) | 44 |
| Azuma, K; Inaba, H; Tasaka, K; Shirai, H | Structural study of ultrathin hydrogenated amorphous carbon films using spectroscopic ellipsometry and ultraviolet Raman spectroscopy | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 39 | (2000) | 6705 |
| Azuma, K; Inaba, H; Tasaka, K; Fujimaki, S; Shirai, H | Control of plasma parameters for high-quality hydrogenated amorphous carbon growth | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 39 | (2000) | 6427 |
| Shirai, H; Sakuma, Y; Yoshino, K; Ueyama, H | Spatial distribution of the high-density microwave plasma and its effect on crystal silicon film growth | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 39 | (2000) | L782 |
| Shirai, H; Sakuma, Y; Moriya, Y; Fukai, C; Ueyama, H | Fast deposition of microcrystalline silicon using high-density SiH4 microwave plasma | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 38 | (1999) | 6629 |
| Shirai, H; Fukuda, Y; Nakamura, T; Azuma, K | Effect of GeF4 addition on the growth of hydrogenated microcrystalline silicon film by plasma-enhanced chemical vapor deposition | THIN SOLID FILMS | 350 | (1999) | 38 |
| Fukai, C; Moriya, Y; Nakamura, T; Shirai, H | Enhanced crystallinity at initial growth stage of microcrystalline silicon on Corning #7059 glass using SiH2Cl2 | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 38 | (1999) | L554 |
| Shirai, H; Sakuma, Y; Ueyama, H | The control of the high-density microwave plasma for large-area electronics | THIN SOLID FILMS | 337 | (1999) | 12 |
| Shirai, H; Arai, T; Ueyama, H | The generation of high-density microwave plasma and its application to large-area microcrystalline silicon thin film formation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 37 | (1998) | L1078 |
| Arai, T; Shirai, H | Study of effect of SiH4 gas heating during growth of hydrogenated microcrystalline silicon on SiO2 by plasma-enhanced chemical-vapor deposition | JOURNAL OF APPLIED PHYSICS | 80 | (1996) | 4976 |
| Arai, T; Nakamura, T; Shirai, H | Initial stage of microcrystalline silicon growth by plasma-enhanced chemical vapor deposition | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 35 | (1996) | L1161 |
| Arai, T; Shirai, H | Role of SiH4 gas heating in the growth of hydrogenated microcrystalline silicon | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 35 | (1996) | L676 |
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